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Horizontal Oven CVD (SiC)

Horizontal Oven CVD (SiC)
The CVD (Silicon Carbide) horizontal tube furnace uses methyltrichlorosilane (MTS) as an air source to make coating materials with oxidation resistant surfaces and to modify the characters of the matrix material. K

Technical characteristics
1. During the deposition process, highly corrosive waste gas, flammable and explosive gas, solid powder and low-melting point material are effectively treated. K
2. The chemical vapor deposition furnace uses a special design deposition chamber, which ensures a good sealing effect and a strong anti-pollution capability. 
3. The most advanced technology is adopted for precise control of the flow and pressure of the methyl trichlorosilane (MTS), making a stable deposition of air flow and a narrow range of fluctuation pressure. K
4. The new design of the anti-corrosion vacuum unit ensures continuous period work and a low maintenance ratio. 
5. Multiple deposition windows achieve homogeneity of field flow, with no deposition in the inactive corners and a better deposition effect. K
6.The work area should be 2.5m × 2.5m × 5m, in order to make room for the large dimensions of the CVD oven

Optional CVD Horizontal Tube Furnace Configuration
1. Oven Door: Revolving / sliding vise type, Manual lock / automatic lock with locking collar. 
2. Oven vessel: All carbon steel / Inner layer of stainless steel / Completely of stainless steel. 
3. Red Hot Zone: Light Carbon Felt / Light Graphite Felt / Composite Hard Felt /CFC. 
4. Heating element and muffle: Pressed isostatic graphite / High press purity, density graphite and fine-grained strength.  K
5. Gas processing system: Volume / mass flow meter, manual / automatic valve, imported brand / china K
6. Vacuum pump and caliber: imported brand / china brand. 
7. HMI: simulation / touch screen / Personal industrial computer. K
8. PLC (Programmable Logic Control): OMRON / Siemens. 
9. Temperature controller: SHIMADEN / EUROTHERM 
10. Thermocouple: Type C, S, K, N. 
11. Recorder: Paperless / paperless recorder, imported / china mark. 
12. Electrical Components: CHINT / Schneider / Siemens. 
13. Loading truck: roller type / fork type / folding type of long distance driving. 

Technical Specifications of the Chemical Vapor Deposition Furnace
Spec / ModelHCVD-060609-SICHCVD-080812-SICHCVD-101015-SICHCVD-121225-SICHCVD-151530-SIC
Working area dimensions (W × H × L) (mm)Φ600 × 600 × 900Φ800 × 800 × 1200Φ1000 × 1000 × 1500Φ1200 × 200 × 2500Φ1500 × 500 × 3000
Maximum temperature (° C)15001500150015001500
Uniform temperature (Cº)± 7.5± 7.5± 7.5± 10± 10
Final vacuum (Pa)fiftyfiftyfiftyfiftyfifty
Pressure increase range (Pa / h)0.670.670.670.670.67
The above parameters can be adjusted according to the process requirements, and do not have to be accepted as standard. The details and specifications required will be recorded in the technical proposal and the contracts.
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